The angular distributions of sputtered Al and Sn atoms ejected from the Al-Sn multi phase alloy bombarded by 30keV Ar+ ion have been measured with collector technique and RBS analysis.

 
  • 用捕獲膜技術(shù)和盧瑟福背散射(RBS)分析,測定Al-Sn多相合金在30keV Ar~+離子轟擊時(shí)Al和Sn的濺射原子角分布。
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