The active energy of the reaction between the adsorption of SiCl4 on silicon and H2 is lower than that of SiCU direct react with H2 in gas phase, so it can be concluded that the silicon substrate has the catalysis in the reaction process.

 
  • SiCl_4吸附后的產(chǎn)物與H_2的反應均要低于其在氣相反應中所需的活化能,因此反應主要在襯底上發(fā)生,且襯底在反應中起到了一定的催化作用。
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