The a-D films have more than 85% sp3 bonding. Density of the films is more than 3 glcm3. Band gap of 2.4 eV is obtained. Hardness is about 30 60 GPa.
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其SP~3鍵的含量超過(guò) 85%25,密度超過(guò) 3g/cm~3;禁帶寬度達2.;4eV,顯微硬度達30~60GPa,厚200nm的薄膜表面粗糙度小于1nm。
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