The Voice Coil Motor (VCM),which characterized as small inertia,high frequency response and fast convergence, is widely applied in high precision motion control in IC Packaging device.

 
  • 音圈電機是一種廣泛應用于IC裝備的高精度驅動(dòng)元件,具有小慣量,高頻響,以及收斂快的控制特性。
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