Photo mask;Resolution enhancement technology (RET);Phase shift mask (PSM);OFF-axis illumination (OAI);Design for manufacturability (DFM是什么意思_Photo mask;Resolution enhancement technology (RET);Phase shift mask (PSM);OFF-axis illumination (OAI);Design for manufacturability (DFM在線(xiàn)翻譯_英語(yǔ)_讀音_用法_例句