PECVD deposited SiO2 can lead to a critical hydration effect such that the gate voltage drift of a PECVD SiO2-gate ISFET is obvious relative to other ISFETs with sensing layers of different materials.
英
美
- 電漿輔助化學(xué)氣象沈積的二氧化矽材料會(huì )導致嚴重的水合作用,因此以此材料當作感測層的離子感測電晶體相對于其他材料的離子感測電晶體而言,會(huì )產(chǎn)生明顯的閘極電壓飄移現象。