Over etching or under etching in IC process causes the variation of the linewidth and spacing between two parallel lines because of the random disturbance of the process.

 
  • 在IC的制造過(guò)程中;由于工藝的隨機擾動(dòng);過(guò)刻蝕和欠刻蝕造成了導線(xiàn)條的寬度和線(xiàn)間距的變化.
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