On the other hand, it is essential to prepare high quality silicon nitride thin film for gate insulator layer of TFT in order to get excellent TFT.

 
  • 與此同時(shí),制備高質(zhì)量的柵絕緣層用氮化硅薄膜也是制備高性能薄膜晶體管(TFT)這一課題的需要。
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