Non-stochastic error characters and error sources of a typical kind of MEMS gyroscope in structures and Comb-drive Tuning Fork Gyroscope (TFG) are researched.

 
  • 綜合考慮梳狀音叉MEMS陀螺質(zhì)心偏移、硅的非等彈性等因素,分析該陀螺中的非隨機性干擾力矩;
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