Comparison work between the original data and compensated data was done and the results show that the proposed strategy could notablely reduce the non-linear error. 對修正前后的變化量進(jìn)行了對比,結果顯示該方法能顯著(zhù)的減小加工的非線(xiàn)性誤差。
The nonlinearity error of the dual-frequency laser interferometer with two longitudinal modes and special subsequent electrical signal processing system was studied. 對具有特殊后續電信號處理系統的雙縱模雙頻激光干涉儀的非線(xiàn)性誤差進(jìn)行了研究。