Nitrogen doped fluorinated diamond-like carbon(FN-DLC)thin films is deposited using radio frequency plasma enhanced chemical vapor deposition under different radio-frequency power with CF_4,CH_4 and N_2 as source gases.

 
  • 以CF4;CH4和N2為源氣體;采用射頻等離子體增強化學(xué)氣相沉積法;在不同射頻功率下制備了含氮氟化類(lèi)金剛石薄膜樣品.
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