Micro Electro Mechanical systems (MEMS) are integrative micro-device systems that consist of micro-sensor, micro-actuator, controlling and signal processing circuit, communication interface and electrical source.
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- 微電子機械系統(Micro Electro Mechanical systems，簡(jiǎn)稱(chēng)MEMS)是由微傳感器、微執行器、信號處理和控制電路、通訊接口和電源等部件組成的一體化的微型器件系統。
