It is indicated that the optimal nonuniformity of wafer surface and material removal rate can be obtained under the wafer and the pad rotating in the same direction with the equal rotational speed.

 
  • 分析結果表明:硅片與拋光墊轉速相等轉向相同時(shí)可獲得最佳的材料去除非均勻性及材料去除率。
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