In this paper, the fabrication of silicon nitride window for soft X-ray microscopy and its field application in National Syn-chrotron Radiation Laboratory of USTC were briefly discussed.

　
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  • 本文主要介紹了用于軟X射線(xiàn)顯微術(shù)的氮化硅窗口的制備工藝，給出在國家同步輻射實(shí)驗室軟X射線(xiàn)顯微術(shù)實(shí)驗站使用的實(shí)驗結果。
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