In this dissertation, by mixing benzoic and adipic acid as the source of proton exchange, wet etched ridge waveguides are successfully fabricated in LiNbO3.

 
  • 摘要:本論文以混合苯甲酸和己二酸作為質(zhì)子酸源,在鈮酸鋰基板上進(jìn)行質(zhì)子交換溼式蝕刻法制作脊形光波導及元件。
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