In the conventional technology,TiO2 film is usually used as an anti-reflection (AR) coating. The SiN layer which is produced by PECVD,is also widely used not only as a good AR coating,but also as an effective surface passivation layer.
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- 除了傳統的由TiO2作為成反射膜的工藝外,由等離子體化學(xué)氣相沉積法(PECVD)制作的SiN是很有效的減反射膜,又是有效的表面鈍化膜。