In order to solve the problem that the mechanical precision of three-axis accelerometer is low now,a three-axis accelerometer based on SOI with single mass is introduced.

 
  • 為了解決現有三軸加速度計機械精度差的問(wèn)題,提出了一種基于SOI的單質(zhì)量塊三軸壓阻微加速度計。
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