In 1978, John H. Clark at Los Alamos Scientific Laboratories for the first time removed the common impurities of silane, such as phosphine (PH3) and arsine (AsH3), by irradiating the silane gas with a pulsed ultraviolet laser.
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- 1978年,洛斯阿拉莫斯科學(xué)實(shí)驗室的克拉克(John h.;Clark)第一次通過(guò)用脈沖紫外激光照射硅烷氣體的辦法,除去硅烷中象磷化氫(Ph3)和砷化三氫(Ash3)這類(lèi)普通雜質(zhì)。