However, the current commercialized MEMS CAD are extremely expansive and the most of their analysis modules can be actually replaced by other cheaper or free FEM or BEM utilities.

 
  • 中文摘要微機電系統之制作,為了避免過(guò)度的試做及時(shí)間的浪費,應用電腦輔助設計是很重要的。
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