For an accurate depth profiling of the Ge concentration, detailed knowledge of the dependence of the refractive index of the SiGe alloy as a function of the Ge concentration is required.

 
  • 對于一個(gè)準確的鍺濃度縱向分布來(lái)說(shuō),需要有鍺硅合金的反射率關(guān)系以作為鍺濃度的函數的詳細知識。
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