Fluorinated diamond-like carbon(F-DLC) films were grown by RF plasma enhanced chemical vapor deposition(PECVD) in a gas mixture of CF4 and CH4 and annealed in Ar environment.

 
  • 以CF4和CH4為源氣體,利用射頻等離子體增強化學(xué)氣相沉積法,在不同條件下制備了氟化類(lèi)金剛石(F-DLC)薄膜,并進(jìn)行了退火處理。
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