Fabricating the nanoporous silicon membrane with nanotechnology and Bio-MEMS technology, the thickness of membrane, pore size and distribution, geometry shape and porosity can precisely controlled.

 
  • 摘要采用納米技術(shù)和生物微電子機械系統技術(shù)制備納米多孔硅膜,可準確控制膜的厚度、幾何形狀、孔大小、孔分布和孔隙率。
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