During the last 10 years, the Micro Electro Mechanical System(MEMS) technology has made remarkable progress, and is possible to be integrated into the optical field.

 
  • 在過(guò)去的十幾年里,隨著(zhù)微機械加工技術(shù)的驚人發(fā)展,微機電系統(MEMS)與光學(xué)技術(shù)的結合應用成為可能,這種結合體被稱(chēng)為微光機電系統(MOEMS)。
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