Due to the diffusion of amorphous carbon in interface layer, the structure of Mo/Si/C multilayer film was changed, and the double diffraction peaks during low-angle X-ray diffraction (LAXD) were observed.

 
  • 同時(shí),由于非晶C在高溫條件下的擴散導致薄膜結構發(fā)生變化,觀(guān)測到薄膜的小角衍射曲線(xiàn)中出現并臨的雙衍射峰結構。
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