Diamond film produced DC arc plasma jet is measured by force driven static measuring ultra micr indentation system UMIS 2000.The result shows that hardness of diamond film is related to not only crystal growth direction but also thickness.

 
  • 使用力驅動(dòng)靜態(tài)超微壓痕測量?jì)x器(Force Driven Static Measuring Ultra Micro- Inden-tation System )- UMIS- 2000 對由直流等離子體噴射法沉積的金剛石膜進(jìn)行測量。 結果顯示金剛石膜的硬度不僅與晶體生長(cháng)方向和晶粒大小有關(guān),還與厚度有關(guān)。
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