Diagnostic test with Langmuir probe of the electron cyclotron resonance (ECR) plasma source was modified to evaluate our lab-built ECR plasma etching system.

 
  • 摘要電子迴旋共振(ECR)等離子體以其密度高、工作氣壓低、均勻性好、參數易于控制等優(yōu)點(diǎn)在超大規模集成電路工藝中獲得了廣泛的應用。
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