By controlling the depth of side etching of metal gate and the length of CNTs, the ability of increasing anode currents and reducing gate leakage currents could be realized.

 
  • 控制金屬閘極側吃的深度和奈米碳管的長(cháng)度,進(jìn)而達到增加陽(yáng)極電流的控制能力并減少閘極的漏電流。
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