But with the development of Micro-Electro-Mechanical System (MEMS) technology, porous silicon has become a new kind of sacrificial and thermal insulating material used in MEMS due to its excellent mechanical and thermal isolation properties.

 
  • 近幾年來(lái),隨著(zhù)微電子機械系統(MEMS)的發(fā)展,多孔硅優(yōu)良的機械性能和熱學(xué)性能逐漸為人們所關(guān)注,成為MEMS中新興的犧牲層材料和絕熱層材料。
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