But the increasing of N2 flow rate enhances the grain growth of Si3N4, which also inhabits the growth of ZrN grain.

 
  • 高的濺射偏壓可促進(jìn)ZrN晶體生長(cháng),N2流量增加則主要促進(jìn)Si3N4晶體生長(cháng);
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