Based on the SIMOX SOI wafer,the SOI structure pressure gauge chip was designed,and the gauge chips were manufactured with MEMS techniques.

 
  • 在 SIMOX 技術(shù) SOI 晶圓的基礎上,設計了壓力敏感芯片結構,并基于 MEMS 工藝制作了芯片。
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