Automated testing using He-Ne scattering light device was set up. HfO_2/SiO_2 coatings were tested, and compared with plasma spark method and phase contrast microscope method.

 
  • 組建了符合國際規范的He-Ne散射法在線(xiàn)檢測損傷系統,對HfO_2/SiO_2高反膜、增透膜進(jìn)行了閾值檢測,并與等離子體閃光法及Nomarski 相襯顯微法對損傷的判斷做了比較。
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