Another noteworthy feature is that the inhomogeneous oxidation of as-deposited HfN film is examined and transferred into the homogeneous HfOxNy film after thermal annealing.

 
  • 另一個(gè)值得注意的現象是對于剛沉積的氮化鉿薄膜中,即已經(jīng)出現了不均勻的氧化,但經(jīng)過(guò)后續的高溫制程處理將轉變成為均勻的氮氧化鉿薄膜。
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