An interferometric MOEMS(Micro-Opto-Electro-Mechanical Systems) gyroscope was presented which has spatial helical optical structure composed of micromirrors.

 
  • 提出一種基于微鏡構成的空間螺旋光路的干涉式MOEMS陀螺,并對其進(jìn)行了原理驗證實(shí)驗研究。
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