An electrostatically actuated in-situ measuring method for average stress gradient and elastic modulus of a MEMS film was proposed based on pull-in voltages of a set of cantilevers.是什么意思_An electrostatically actuated in-situ measuring method for average stress gradient and elastic modulus of a MEMS film was proposed based on pull-in voltages of a set of cantilevers.在線(xiàn)翻譯_英語(yǔ)_讀音_用法_例句