Advanced by the new-high technology and draught by the strong market demand, various micro sensors and MEMS made on the basis of integrated circuit technology and micro machining processing technology come to the force in the competition.
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- 微電子機械系統(MEMS)技術(shù)是建立在微米/納米技術(shù)(micro/nanotechnology)基礎上的21世紀前沿技術(shù)，是指對微米/納米材料進(jìn)行設計、加工、制造、測量和控制的技術(shù)。 它可將機械構件、光學(xué)系統、驅動(dòng)部件、電控系統集成為一個(gè)整體單元的微型系統。
