Accurate control of the fine stage up down motion is the key to achieve automatic measurement of the thin film step height in large scale integration (LSI).

 
  • 對微位移工作臺升降運動(dòng)的精確控制是實(shí)現大規模集成電路中薄膜臺階高度測量自動(dòng)化的關(guān)鍵。
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