According to the parameter requirement of the graded reflectivity mirror (GRM) with Gaussian profile, the layer structure and the mask pattern were designed by using graded-thickness middle layer.

 
  • 按照高斯型漸變反射率鏡(GRM)的參數要求,采用了中間層厚度漸變的方案對膜系和掩模板形狀進(jìn)行設計。
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