According to the industrial develop trend of making the sensor size smaller and smaller, semiconducting type gas sensor for ethonal vapor by using Mems technics was chosen as the study direction.

 
  • 針對近年來(lái)在傳感器微型化的趨勢下的一些研究成果,確定了采用半導體式傳感原理制備微型乙醇氣體傳感器的制作方案。
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