A two-dimensional (2D) physical model of reactive ion etching (RIE) which includes isotropic and anisotropic components is presented.The physical model is analyzed.

　
英 美
  • 摘要反應離子刻蝕(RIE)的二維物理模型，包括各向同性和各向異性?xún)刹糠帧?/strong>
目錄
附錄 查詞歷史
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