A system of drilling is designed with respect to the defects of general excimer laser microdrilling system.In the new system, a hollow metal waveguide is used to uniform the exeimer laser beam.

 
  • 分析了現有準分子激光打孔系統的優(yōu)缺點(diǎn),研究了對經(jīng)過(guò)光波導的光束進(jìn)行掩模打孔的一套加工系統。
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