A novel Si/Ti/Au/Au/Ti/Si bonding method based on Au/ Si eutectic bonding was presented for forming a gas chamber. The detector was fabricated and responded basically using this bonding method.

 
  • 運用Si/Ti/Au/Au/Ti/Si實(shí)現對探測器的金/硅共晶鍵合封裝,形成氣室,制備出探測器樣品并初步得到響應。
今日熱詞
目錄 附錄 查詞歷史
国内精品美女A∨在线播放xuan