A new type of the PZT driving device to realize the planar movement by using the bimorph oscillator as the driver was presented.

 
  • 摘要采用雙壓電晶片振子為移動(dòng)機構的驅動(dòng)源,提出可以實(shí)現二維平面移動(dòng)的新型壓電驅動(dòng)機構。
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