A monolithic silicon multi-sensor on SOI wafer that consists of a three-axis piezoresistive accelerometer, a piezoresistive absolute pressure sensor, and a silicon thermistor temperature sensor is presented.
英
美
- 摘要為滿(mǎn)足小體積、多參數測量的要求,采用SOI硅片,設計了一種測量三軸加速度、絕對壓力、溫度參數的單片集成硅微傳感器,其中加速度、絕對壓力傳感器基于摻雜硅壓阻效應,溫度傳感器基于摻雜硅電阻溫度效應。