A microelectromechanical system (MEMS ) with its technologies,materials, devices and applications are introduced. the market prospects and the technical trends are discussed.

 
  • 介紹了微電子機械系統(MEMS)的技術(shù)、材料、器件及應用,討論了它的發(fā)展趨勢及將來(lái)的市場(chǎng)。
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