A lumped parameter model was developed for predicting the transient motion of mirrors, taking into account electrostatic and tensile forces and viscous air damping via squeeze film theory.

 
  • 考慮靜電驅動(dòng)力、張力和空氣阻尼衰減對變形鏡回復過(guò)程的影響,建立一種復合參數模型來(lái)預測變形鏡的瞬態(tài)行為。
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