A lotof experiments have demonstrated that thewritten device is satisfied for the servo deco-de written demand of the etched servo disk,and it is hopeful that the etched servo diskwould be used in practical drive disk.
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美
- 實(shí)驗結果表明；所研究的刻寫(xiě)裝置適合光刻伺服盤(pán)伺服編碼刻寫(xiě)要求；為光刻伺服盤(pán)進(jìn)一步實(shí)用化打下了基礎.
