A comprehensive study has been performed on the phase compositions, element distributions and binding states of the N + B ion implanted layer by means of X- ray diffraction(XRD), Auger electron spectroscopy(AES) and X- ray photoelectron spectroscopy(XPS).

 
  • 用X-射線(xiàn)衍射(XRD)、俄歇電子能譜(AES)和X-光電子能譜(XPS)的方法對N+B離子注入層的相組成、元素的分布和元素的結合狀態(tài)進(jìn)行了綜合考察。
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