A basic model of sacrificial layer-phosphosilicate-glass (PSG) etching was introduced ,and Power law model was elucidated in details.

　
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  • 介紹了在硅微機械加工的犧牲層釋放中,氫氟酸(HF)腐蝕磷硅玻璃(PSG)模型的建立過(guò)程,詳細闡述了Power law模型。
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